发明名称 CIGS FILM PRODUCTION METHOD, AND CIGS SOLAR CELL PRODUCTION METHOD USING THE CIGS FILM PRODUCTION METHOD
摘要 The present invention provides a CIGS film production method which ensures that a CIGS film excellent in conversion efficiency can be produced at lower costs with higher reproducibility, and a CIGS solar cell production method using the CIGS film production method. The CIGS film production method includes: a stacking step of stacking an (A) layer containing indium, gallium and selenium and a (B) layer containing copper and selenium in this order in a solid phase over a substrate while heating at a temperature of higher than 250° C. and not higher than 400° C.; and a heating step of further heating the resulting stack of the (A) layer and the (B) layer to melt a compound of copper and selenium in the (B) layer into a liquid phase, whereby copper is diffused from the (B) layer into the (A) layer to cause crystal growth to provide a CIGS film.
申请公布号 US2016005912(A1) 申请公布日期 2016.01.07
申请号 US201414766066 申请日期 2014.01.24
申请人 NITTO DENKO CORPORATION 发明人 NISHII Hiroto;WATANABE Taichi;TERAJI Seiki;KAWAMURA Kazunori;MINEMOTO Takashi;CHANTANA Jakapan;MURATA Masashi
分类号 H01L31/0749;H01L31/032;H01L31/18 主分类号 H01L31/0749
代理机构 代理人
主权项 1. A CIGS film production method for producing a CIGS film to be used as a light absorbing layer for a CIGS solar cell, the method comprising: a stacking step of stacking an (A) layer containing indium, gallium and selenium and a (B) layer containing copper and selenium in this order in a solid phase over a substrate while heating at a temperature of higher than 250° C. and not higher than 4000° C.; and a heating step of further heating a resulting stack of the (A) layer and the (B) layer to melt the (B) layer into a liquid phase, whereby copper is diffused from the (B) layer into the (A) layer to cause crystal growth to provide the CIGS film.
地址 Ibaraki-shi, Osaka JP