PATTERNING CONDUCTIVE FILMS USING VARIABLE FOCAL PLANE TO CONTROL FEATURE SIZE

摘要

A processing system directs a laser beam to a composite including a substrate, a conductive layer, and a conductive border. The location of a focus of the laser beam can be controlled to bring the laser beam into focus on the surfaces of the conductive materials. The laser beam can be used to ablatively process the conductive border and non-ablatively process the conductive layer by translating a focus-adjust optical system so as to vary laser beam diameter.

主权项

1. An optical processing system comprising:
an objective lens situated to direct a processing optical beam to a target surface; a scanning system situated to scan the processing optical beam across the target surface; a focus-adjust optical system that includes a focus-adjust optical element and a focus actuator, the focus-adjust optical element situated to direct the optical beam to the objective lens, wherein the focus actuator is coupled to the focus-adjust optical element so as to translate the focus-adjust optical element along an axis of the objective lens so as to maintain a focus of the processing beam as the processing beam is scanned across the target surface; and a beam diameter actuator situated to translate the focus-adjust optical system so as to define a processing beam diameter at the target surface.