发明名称 |
TEMPERATURE CONTROL APPARATUS INCLUDING GROOVE-ROUTED OPTICAL FIBER HEATING, SUBSTRATE TEMPERATURE CONTROL SYSTEMS, ELECTRONIC DEVICE PROCESSING SYSTEMS, AND PROCESSING METHODS |
摘要 |
Substrate temperature control apparatus including groove-routed optical fibers. Substrate temperature control apparatus includes upper and lower members including grooves in one or both, and a plurality of optical fibers routed in the grooves. In one embodiment, the optical fibers are adapted to provide light-based pixelated heating. In another embodiment, embedded optical temperature sensors are adapted to provide temperature measurement. Substrate temperature control systems, electronic device processing systems, and methods including groove-routed optical fiber temperature control and measurement are described, as are numerous other aspects. |
申请公布号 |
WO2016003630(A1) |
申请公布日期 |
2016.01.07 |
申请号 |
WO2015US35500 |
申请日期 |
2015.06.12 |
申请人 |
APPLIED MATERIALS, INC |
发明人 |
BUSCHE, MATTHEW;BOYD, WENDELL JR.;DZILNO, DMITRY A.;PARKHE, VIJAY D.;RICE, MICHAEL R.;VOLFOVSKI, LEON |
分类号 |
H01L21/324;H01L21/02;H01L21/683 |
主分类号 |
H01L21/324 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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