发明名称 |
SUBSTRATE TRANSFER ROBOT END EFFECTOR |
摘要 |
Embodiments of apparatus for supporting a substrate are disclosed herein. In some embodiments, an apparatus for supporting a substrate includes a support member; and a plurality of substrate contact elements protruding from the support member, wherein each of the plurality of substrate contact elements includes: a first contact surface to support a substrate when placed thereon; and a second contact surface extending from the first contact surface, wherein the second contact surface is adjacent a periphery of the substrate to prevent radial movement of the substrate, wherein the first contact surface is at a first angle with respect to the support member and the second contact surface is at a second angle with respect to the support member, and wherein the first angle is between about (3) degrees and (5) degrees. |
申请公布号 |
WO2016003598(A1) |
申请公布日期 |
2016.01.07 |
申请号 |
WO2015US34333 |
申请日期 |
2015.06.05 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
AGARWAL, PULKIT;GREENBERG, DANIEL;SUH, SONG-MOON;BRODINE, JEFFREY;SANSONI, STEVEN V.;MORI, GLEN |
分类号 |
H01L21/677 |
主分类号 |
H01L21/677 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|