| 摘要 |
PROBLEM TO BE SOLVED: To provide an image-forming optical system that is a catoptric optical system applicable to an exposure apparatus employing EUV light and can achieve an increased numerical aperture while enabling optical path separation of light fluxes.SOLUTION: In a catoptric image-forming optical system which forms an image of a first surface 4 onto a second surface 7, a numerical aperture at a second surface side with respect to a first direction (X direction) on the second surface is larger than 1.1 times of a numerical aperture at the second surface side with respect to a second direction (Y direction) that intersects the first direction on the second surface. |
