| 摘要 |
PROBLEM TO BE SOLVED: To achieve highly accurate detection of pressure in which an error due to the strain of a housing caused by stresses other than a measuring pressure is excluded.SOLUTION: A pressure sensor comprises: a metal housing 10 having a threaded portion 11 that is attached to an object to be measured; a metal diaphragm 14, provided in the housing 10, for receiving a measuring pressure; and a first semiconductor chip 20, fixed to the diaphragm 14, for outputting an electric signal corresponding to the deformation of the diaphragm 14 due to the measuring pressure. On the periphery of the diaphragm 14 in the housing 10 is provided a second semiconductor chip 40 for detecting the strain of the housing 10 due to pressure other than the measuring pressure, so that the electric signal outputted from the first semiconductor chip 20 is corrected on the basis of the strain of the housing 10 detected by this second semiconductor chip 40. |
