METHOD OF FABRICATING SOLAR CELL WITH TUNNEL DIELECTRIC LAYER

摘要

PROBLEM TO BE SOLVED: To provide methods of fabricating solar cells with tunnel dielectric layers, and solar cells with tunnel dielectric layers.SOLUTION: A method of fabricating a solar cell comprises: exposing a surface of a substrate of the solar cell to a wet chemical solution to provide an oxide layer on the surface of the substrate; and heating the oxide layer in a dry atmosphere at a temperature near or above 900 degrees Celsius to convert the oxide layer to a tunnel dielectric layer of the solar cell. An amorphous silicon layer as a material layer is formed on the tunnel dielectric layer.