SUBSTRATE HOLDING FRAME BODY AND SUBSTRATE PACKAGE

摘要

PROBLEM TO BE SOLVED: To provide a substrate holding frame body or the like capable of safely store and transport a substrate with a large size of about 2 m square.SOLUTION: A resin layer 17 with rigidity and a uniform thickness, which contains a filler, is formed on a top surface of a metallic frame body for being loaded with a substrate A1, which is formed of the same continuous flat and curved surfaces, not being associated with a groove, a step part and a ridgeline between top surfaces of respective parts of the metallic frame body. The upper and lower metallic frame bodies are not brought into contact with each other.