发明名称 THERMALLY CONDUCTIVE SHEET, CURED PRODUCT THEREOF, AND SEMICONDUCTOR DEVICE
摘要 A thermally conductive sheet includes a thermosetting resin and an inorganic filler material dispersed in the thermosetting resin. Measuring a pore diameter distribution through mercury intrusion technique for the inorganic filler material included in an incineration residue after a cured product of the thermally conductive sheet is heated and incinerated at 700° C. for four hours, a porosity of the inorganic filler material represented as 100×b/a is greater than or equal to 40% and less than or equal to 65% given that a is the volume of particles of the inorganic filler material included in the incineration residue, and b is the volume of voids in the particles of the inorganic filler material included in the incineration residue. An average pore diameter of the inorganic filler material included in the incineration residue is greater than or equal to 0.20 μm and less than or equal to 1.35 μm.
申请公布号 US2016002445(A1) 申请公布日期 2016.01.07
申请号 US201514789333 申请日期 2015.07.01
申请人 SUMITOMO BAKELITE CO., LTD. 发明人 Mochizuki Shunsuke;Kitagawa Kazuya;Shirato Yoji;Nagahashi Keita;Tsuda Mika;Hirasawa Kazuya;Kurokawa Motomi
分类号 C08K7/24;H01L23/495;H01L23/29;C08K3/38 主分类号 C08K7/24
代理机构 代理人
主权项 1. A thermally conductive sheet that includes a thermosetting resin and an inorganic filler material which is dispersed in the thermosetting resin, wherein when a pore diameter distribution is measured through mercury intrusion technique for the inorganic filler material that is included in an incineration residue after a cured product of the thermally conductive sheet is heated at 700° C. for four hours and is incinerated, a porosity of the inorganic filler material indicated by 100×b/a is greater than or equal to 40% and less than or equal to 65% given that a is the volume of particles of the inorganic filler material included in the incineration residue, and b is the volume of voids in particles of the inorganic filler material included in the incineration residue, which is measured through the mercury intrusion technique, and an average pore diameter of the inorganic filler material included in the incineration residue which is measured through the mercury intrusion technique is greater than or equal to 0.20 μm and less than or equal to 1.35 μm.
地址 Tokyo JP