| 发明名称 |
IMPRINT APPARATUS, IMPRINT SYSTEM, AND METHOD OF MANUFACTURING ARTICLE |
| 摘要 |
The present invention provides an imprint apparatus which performs an imprint process of dispensing an imprint material on a substrate and forming the imprint material dispensed on the substrate by using a mold, the apparatus comprising a dispensing unit configured to dispense an imprint material on the substrate, and including a tank which contains an imprint material, a dispenser which discharges the imprint material contained in the tank to the substrate, and a detection unit which detects a remaining amount of imprint material contained in the tank; and a control unit configured to perform control to supply an imprint material to the tank or exchange the dispensing unit based on a detection result obtained by the detection unit. |
| 申请公布号 |
US2016001493(A1) |
申请公布日期 |
2016.01.07 |
| 申请号 |
US201514754944 |
申请日期 |
2015.06.30 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Mita Yutaka;Miyajima Yoshikazu;Arai Tsuyoshi |
| 分类号 |
B29C59/00 |
主分类号 |
B29C59/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An imprint apparatus which performs an imprint process of dispensing an imprint material on a substrate and forming the imprint material dispensed on the substrate by using a mold, the apparatus comprising:
a dispensing unit configured to dispense an imprint material on the substrate, and including a tank which contains an imprint material, a dispenser which discharges the imprint material contained in the tank to the substrate, and a detection unit which detects a remaining amount of imprint material contained in the tank; and a control unit configured to perform control to supply an imprint material to the tank or exchange the dispensing unit based on a detection result obtained by the detection unit. |
| 地址 |
Tokyo JP |
