发明名称 Thin film formation
摘要 A method of forming a graphene film (20) on one or more surfaces (10) of a copper-containing substrate (12) comprising the steps of: (i) heating a copper-containing substrate (12) defining one or more surfaces (10) to an exposure temperature; (ii) exposing the substrate (12) to a carbon-containing precursor gas at the exposure temperature for a predetermined period of time to dissolve carbon atoms into the substrate (12) and saturate the substrate (12) with carbon atoms; and (iii) cooling the substrate (12) so as to segregate the dissolved carbon atoms (16) from the substrate (12) to form a graphene film (20) on the or each surface (10) of the substrate (12); wherein the method further includes the step of selecting the copper-containing substrate (12) on the basis of its thickness to control the depth of the graphene film (20) formed on the or each surface (10) of the substrate (12) on cooling the substrate (12) so as to segregate the dissolved carbon atoms from the substrate (12).
申请公布号 GB2498944(B) 申请公布日期 2016.01.06
申请号 GB20120001600 申请日期 2012.01.31
申请人 UNIVERSITEIT LEIDEN 发明人 GUOCAI DONG;RICHARD VAN RIJN
分类号 H01L21/02;C01B31/04 主分类号 H01L21/02
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