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发明名称
Verfahren zum Herstellen von dünnen Schichten aus hochreinen Materialien
摘要
申请公布号
AT257692(B)
申请公布日期
1967.10.25
申请号
AT19660001033
申请日期
1966.02.04
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
分类号
C23C14/00;C23C16/00
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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