| 摘要 |
A charged particle beam drawing apparatus of the present invention comprises a drawing part which draws a pattern on an object by deflecting a charged particle beam, and a control part which has a control calculator for controlling the drawing part. The control calculator has a velocity calculating part which calculates a first drawing velocity in the first region of the drawing region of the object based on a run-up start coordinate, a drawing start coordinate, and a first acceleration, and calculates the range of the first region based on the run-up start coordinate, the drawing start coordinate, and the first acceleration; and a drawing control part which controls the drawing part to successively draw the first region with the first drawing velocity and a second region with a second drawing velocity. |
