发明名称 真空蒸着用加熱組立体及びこれを備える真空蒸着装置
摘要 <p>The present invention is a vacuum evaporation heating assembly for heating a carrier, in which an evaporation material is filled, in a vacuum evaporation process, the vacuum evaporation heating assembly comprising: a carrier container in which the carrier is installed; and an electrode connector which extends in both directions of the carrier container to be connected to an electrode. At least one of the carrier container and the electrode connector is a plate-shaped member. The vacuum evaporation heating assembly can securely hold the carrier, in which the evaporation material is filled, and can vaporize the evaporation material in a specialized direction, thereby uniformly and efficiently evaporating the evaporation material with a small number of carriers.</p>
申请公布号 JP5838267(B2) 申请公布日期 2016.01.06
申请号 JP20140527109 申请日期 2013.07.23
申请人 セコ コーポレイション リミテッド 发明人 キム,ヒョンジュン;キム,ホンチョル;ジョン,キョンイル;キム,ジョンレ;ファン,ヨンジュン
分类号 C23C14/24 主分类号 C23C14/24
代理机构 代理人
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