| 摘要 |
The present invention provides a scribing device which can scribe a line to be scribed in the orthogonal direction without being interfered by a chucking claw even though a width of a cutting area of a substrate is as small as to be almost equal to a grip area of the chucking claw. The scribing device of the present invention comprises a grip carrying unit (B) which carries the substrate (W) to a scribe unit (C) on the downstream side in the state where an upstream end of the substrate (W) was gripped with a chucking claw (11), and processes a scribe line along the line to be scribed (S1) in the direction orthogonal to a substrate transferring direction on the surface of the substrate by a cutter wheel (23) which the scribe unit (C) possesses. When the scribing device processes the line to be scribed (S1) in the orthogonal direction which adjoins the chucking claw (11) by the cutter wheel (23), grip of the substrate (W) by the chucking claw (11) may be released and the chucking claw (11) may evacuate to the the cutter wheel (23) and a position where the chucking claw (11) does not interfere. |
