Substrate processing apparatus

摘要

A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

主权项

1. A substrate processing apparatus comprising:
a frame; a first SCARA arm connected to the frame, the first SCARA arm includes an end effector and is configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, the second SCARA arm includes an end effector and is configured to extend and retract along a second radial axis, the first and second SCARA arms each having a respective shoulder axis of rotation and being disposed on a common base; and a drive section coupled to the first and second arms, the drive section being configured to
independently extend each of the first and second SCARA arms along a respective radial axis and rotate each of the first and second SCARA arms with respect to the common base where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, andindependently move at least an arm portion of one SCARA arm of the first and second SCARA arms along a lift axis, where the lift axis is transverse to the first and second radial axes so that at least the arm portion of the one SCARA arm of the first and second SCARA arms moves along the lift axis independent of at least another arm portion of another SCARA arm of the first and second SCARA arms; wherein each end effector is configured to hold at least one substrate.