Active Array Substrate and Manufacturing Method Thereof

摘要

An active array substrate includes a flexible substrate, an inorganic barrier layer, and at least one active component. The inorganic barrier layer covers the flexible substrate. The inorganic barrier layer has a through hole therein. The through hole of the inorganic barrier layer exposes the flexible substrate. The active component is disposed on the inorganic barrier layer.

主权项

1. A manufacturing method of an active array substrate comprising:
forming a flexible substrate on a carrier with a photosensitive stripping layer therebetween; forming an inorganic barrier layer to cover the flexible substrate; forming at least one active component on the inorganic barrier layer; forming a through hole in the inorganic barrier layer to expose the flexible substrate; irradiating the photosensitive stripping layer with a light source; and stripping the photosensitive stripping layer from the carrier.