| 发明名称 |
PROCESSING APPARATUS |
| 摘要 |
A processing apparatus including a holding unit that holds a workpiece and a grinding unit that grinds the workpiece held by the holding unit is provided. The processing apparatus includes a gettering capability determining unit that determines whether or not grinding distortion generated by grinding the workpiece held by the holding unit by the grinding unit has sufficient gettering capability. |
| 申请公布号 |
US2015380283(A1) |
申请公布日期 |
2015.12.31 |
| 申请号 |
US201514749965 |
申请日期 |
2015.06.25 |
| 申请人 |
DISCO CORPORATION |
发明人 |
Sukegawa Naoya |
| 分类号 |
H01L21/67;B24B49/00;B24B7/22 |
主分类号 |
H01L21/67 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. Processing apparatus comprising:
holding means for holding a workpiece; grinding means for grinding the workpiece held by the holding means; and gettering capability determining means for determining whether or not grinding distortion generated by grinding the workpiece held by the holding means by the grinding means has gettering capability. |
| 地址 |
Tokyo JP |
