MONOLITHIC TRANSISTOR CIRCUITS WITH TAPERED FEEDBACK RESISTORS, RF AMPLIFIER DEVICES, AND METHODS OF MANUFACTURE THEREOF

摘要

Embodiments of an integrated resistor may be incorporated into monolithic transistor circuits and packaged RF amplifier devices. An embodiment of an integrated resistor includes a semiconductor substrate and a resistor formed over the top surface of the semiconductor substrate from resistive material. The resistor includes at least first and second resistive sections. The first resistive section is tapered so that the first resistive section widens toward an input end of the resistor. The second resistive section is coupled in series with the first resistive section. According to a further embodiment, the second resistive section also is tapered so that the second resistive section widens toward an output end of the resistor. According to another further embodiment, a third resistive section with one or more meanders is coupled in series between the first and second resistive sections.

主权项

1. An integrated resistor comprising:
a semiconductor substrate having a top surface; and a resistor formed over the top surface of the semiconductor substrate from one or more portions of one or more layers of resistive material, wherein the resistor includes an input end, an output end, a first resistive section having a first length defined between a first end of the first resistive section and a second end of the first resistive section, wherein the first end of the first resistive section corresponds to the input end of the resistor, and the first end of the first resistive section has a first width, and wherein the second end of the first resistive section has a second width in a range of 5 percent to 60 percent of the first width, and a second resistive section coupled in series with the first resistive section, wherein the second resistive section has a second length defined between a first end of the second resistive section and a second end of the second resistive section, wherein the first end of the second resistive section is coupled to the second end of the first resistive section, and the second end of the second resistive section corresponds to the output end of the resistor.