SEMICONDUCTOR STRUCTURE

摘要

A semiconductor structure includes a substrate, a first un-doped semiconductor layer, a second un-doped semiconductor layer and at least one doped insertion layer. The first un-doped semiconductor layer is disposed on the substrate. The second un-doped semiconductor layer is disposed on the first un-doped semiconductor layer.;The doped insertion layer is disposed between the first un-doped semiconductor layer and the second un-doped semiconductor layer. A chemical formula of the doped insertion layer is InxAlyGa1-x-yN, wherein 0≦x≦1, 0≦y≦1.

主权项

1. A semiconductor structure, comprising:
a substrate; a first un-doped semiconductor layer, disposed on the substrate; a second un-doped semiconductor layer, disposed on the first un-doped semiconductor layer; and at least one doped insertion layer, disposed between the first un-doped semiconductor layer and the second un-doped semiconductor layer, wherein a chemical formula of the doped insertion layer is InxAlyGa1-x-yN, wherein 0≦x≦1, 0≦y≦1.