发明名称 A METHOD FOR DETERMINING THE SPECTRAL SCALE OF A SPECTROMETER AND APPARATUS
摘要 A method for determining spectral calibration data (λcal(Sd), Sd,cal(λ)) of a Fabry-Perot interferometer (100) comprises: - forming a plurality of filtered spectral peaks (P'1, P'2) by filtering input light (LB1) with a Fabry-Perot etalon (50) such that a first filtered peak (Ρ'1) corresponds to a first transmittance peak (P1) of the etalon (50), and such that a second filtered peak (P'2) corresponds to a second transmittance peak (P2) of the etalon (50), - using the Fabry-Perot interferometer (100) for measuring a spectral intensity distribution (M(Sd)) of the filtered spectral peaks (Ρ'1, P'2), wherein the spectral intensity distribution (M(Sd)) is measured by varying the mirror gap (dFP) of the Fabry-Perot interferometer (100), and by providing a control signal (Sd) indicative of the mirror gap (dFP), and - determining the spectral calibration data (λcal(Sd), Sd,cal(λ)) by matching the measured spectral intensity distribution (M(Sd)) with the spectral transmittance (ΤΕ(λ)) of the etalon (50).
申请公布号 WO2015197920(A1) 申请公布日期 2015.12.30
申请号 WO2015FI50476 申请日期 2015.06.29
申请人 SPECTRAL ENGINES OY 发明人 ANTILA, JARKKO;KANTOJÄRVI, UULA;AKUJÄRVI, ALTTI;TUOHINIEMI, MIKKO;MÄKYNEN, JUSSI
分类号 G01J3/26;G01J3/28;G02B5/28;G02B26/00;G02F1/21 主分类号 G01J3/26
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