发明名称 |
ENERGY-SENSITIVE RESIN COMPOSITION |
摘要 |
Provided are: an energy-sensitive resin composition that provides a highly transparent polybenzoxazole resin suppressed in coloring, which has excellent chemical resistance and excellent mechanical characteristics such as tensile elongation, even in cases where a polybenzoxazole precursor is thermally treated at low temperatures; a method for producing a polybenzoxazole film or polybenzoxazole molded body using the energy-sensitive resin composition; and a pattern forming method using the energy-sensitive resin composition. An energy-sensitive resin composition according to the present invention contains: a polybenzoxazole precursor that is obtained by reacting an aromatic diamine diol with a diformyl compound or a dicarboxylic acid dihalide; a solvent; and a compound (A) that is decomposed by the action of light and/or heat and generates a base and/or an acid. |
申请公布号 |
WO2015198887(A1) |
申请公布日期 |
2015.12.30 |
申请号 |
WO2015JP66935 |
申请日期 |
2015.06.11 |
申请人 |
TOKYO OHKA KOGYO CO., LTD. |
发明人 |
NODA, KUNIHIRO;CHISAKA, HIROKI;SHIOTA, DAI |
分类号 |
G03F7/038;C08G73/22;G03F7/004;G03F7/40 |
主分类号 |
G03F7/038 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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