SAMPLE INTRODUCTION METHOD, SAMPLE STAGE, AND CHARGED PARTICLE BEAM DEVICE

摘要

The sample introduction method for introducing a sample that contains moisture into a sample chamber of a charged particle beam device comprises: a step (S100) for mounting the sample onto a sample holding part; a step (S102) for covering a predetermined region of the sample with a moisture-retaining material; a step (S104) for evacuating the sample chamber housing the sample whereof the predetermined region has been covered with the moisture-retaining material; and a step (S106) for exposing the predetermined region covered with the moisture-retaining material.