发明名称 |
NEGATIVE RESIST COMPOSITION |
摘要 |
<p>The negative resist composition of the present invention comprises a silsesguioxane resin (A) comprising a constituent unit (a1) represented by the following general formula (I) and a constituent unit (a2) represented by the following general formula (II), an acid generator component (B) which generates an acid upon exposure, and a crosslinking agent component (C):
wherein R 1 represents a linear or branched alkylene group having to 5 carbon atoms, and</p> |
申请公布号 |
EP1726992(B1) |
申请公布日期 |
2015.12.30 |
申请号 |
EP20050720597 |
申请日期 |
2005.03.11 |
申请人 |
TOKYO OHKA KOGYO CO., LTD. |
发明人 |
ANDO, TOMOYUKI |
分类号 |
G03F7/038;C08G77/16;G03F7/004;G03F7/075;H01L21/027 |
主分类号 |
G03F7/038 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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