Display apparatus with densely packed electromechanical systems display elements

摘要

This disclosure provides systems, methods and apparatus for reducing undesired capacitance and electrostatic attraction among components of electromechanical systems (EMS) displays. An apparatus includes an array of display elements, a control matrix, and an electric insulation layer. The display elements each include a movable light blocking component coupled to a conductive beam. The control matrix includes a plurality of interconnects, including at least one switched interconnect, which passes under and is electrically isolated from at least one of the conductive beam and the movable light blocking component.

主权项

1. An apparatus comprising:
an array of display elements between a first substrate and a second substrate, each display element having suspended components including a movable light blocking component and a conductive beam coupled to the movable light blocking component; a control matrix including a plurality of interconnects, including at least one switched interconnect which couples to portions of a plurality of the display elements in the array, passes under at least one of the conductive beam and the movable light blocking components, and which is electrically isolated from the movable light blocking components; an electrical insulation layer having a thickness greater than about 1 micron and less than about 5 microns, disposed between an uppermost interconnect of the control matrix and the suspended components of the display elements; and a fluid filling a space between the first substrate and the second substrate.