Slide parts and equipment including same

摘要

It is an objective of the invention to provide a slide part in which a seal member formed of an elastic body is in sliding contact with a hard member. There is provided a slide part comprising: a hard member having an amorphous carbon coating containing nitrogen formed on an outermost surface of a substrate; and a seal member formed of an elastic body, the seal member being in sliding contact with the hard member, wherein: content of the nitrogen in the coating is 3 at. % or more and 25 at. % or less, taking a total content of the carbon and the nitrogen in the coating as 100 at. %; the seal member contains fluorine at least in a sliding contact surface region thereof; and content of the fluorine in the surface region of the seal member is equal to or more than the nitrogen content in the coating.

主权项

1. A slide part, comprising:
a hard member having an amorphous carbon coating containing nitrogen formed on an outermost surface of a substrate; and a seal member formed of an elastic body, the seal member being in sliding contact with the hard member to prevent fluid leakage past a sliding contact surface region of the seal member, wherein: content of the nitrogen in the amorphous carbon coating is equal to or more than 3 atomic percentage (at. %) and equal to or less than 25 at. %, taking a total content of the carbon and the nitrogen in the amorphous carbon coating as 100 at. %; the seal member contains fluorine at least in the sliding contact surface region thereof; and content of the fluorine in the sliding contact surface region of the seal member is equal to or more than the nitrogen content in the amorphous carbon coating, and wherein: a plurality of interlayers are provided between the amorphous carbon coating and the substrate of the hard member, the plurality of interlayers comprising: a first interlayer formed of chromium immediately on the substrate; and a second interlayer formed of said chromium and the elements composting the amorphous carbon coating immediately on the first interlayer such that content of said chromium gradually decreases as content of the elements composting the amorphous carbon coating gradually increases in the second interlayer.