| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring apparatus and a measuring method for a three-dimensional shape by using a multi-wavelength.SOLUTION: A measuring apparatus for a three-dimensional shape by using a multi-wavelength includes: a transfer stage which transfers a measurement object to a measurement position; a first projector which irradiates first pattern light having a first equivalent wavelength toward the measurement object in a first direction; a second projector which irradiates second pattern light having a second equivalent wavelength that is different from the wavelength of the first equivalent wavelength toward the measurement object in a second direction; a camera unit which photographs a first pattern image by the first pattern light reflected from the measurement object on the transfer stage and a second pattern image by the second pattern light; and a control unit which controls the first projector and the second projector, receives the first pattern image and the second pattern image when the camera unit photographs the first pattern image and the second pattern image, and calculates the three-dimensional shape of the measurement object. |
