| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for producing a seed crystal holder, whereby separation of a seed crystal from a holder member can be suppressed, the seed crystal holder, a crystal growing apparatus, and a crystal growing method. <P>SOLUTION: The method for producing the seed crystal holder comprises: a preparation step of preparing the holder member 2 made of carbon and a seed crystal 3 that is made of silicon carbide and has an upper surface 3A that is larger than a lower surface 2A of the holder member 2; a fixation step of fixing the upper surface 3A of the seed crystal 3 onto the lower surface 2A of the holder member 2; a placement step of placing silicon particles 16 onto a part of the upper surface 3A of the seed crystal 3 which protrudes from the holder member 2 so that they come into contact with a lateral surface 2B of the holder member 2; a heating step of heating the seed crystal 3, the holder member 2 and the particles 16 to a temperature higher than the melting point of silicon; and a bonding step of bonding the seed crystal 3 to the holder member 2 via the molten particles 16. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
