| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for dividing a plate-like object, by which the risk of causing a failure in the division can be reduced.SOLUTION: A method for dividing a plate-like object having, in its surface, scheduled division lines intersecting with each other comprises: a division-start point formation step for forming division-start points along the scheduled division lines of the plate-like object; an expandable sheet-sticking step for sticking an expandable sheet to the backside of the plate-like object before or after execution of the division-start point formation step; and a division step for applying an external force to the plate-like object by expanding the expandable sheet and thus, dividing the plate-like object from the division-start points after execution of the expandable sheet-sticking step. The method further comprises a dry cleaning step for dry-cleaning the backside of the plate-like object, thereby removing an organic material deposited on the backside of the plate-like object before execution of the expandable sheet-sticking step. |
