THREE DIMENSION PROBE AND ITS FABRICATION METHOD

摘要

The present invention relates to a 3D probe, a manufacturing method thereof, and a laminate for manufacturing a 3D probe. The method comprises the following steps of: extracting a mother laminate material after sequentially stacking an effective probe layer, a probe head layer, and a probe protection layer on an upper part of a probe substrate layer; bonding a leading cantilever part to the extracted mother laminate material; milling the leading cantilever part and the mother laminate material to have a cylindrical shape; and etching the effective probe layer as much as a preset depth after eliminating the probe protection layer. Therefore, a probe head protrudes from an upper part of an effective probe part to three-dimensionally measure materials and features of substances so that a 3D probe capable of precise 3D measurement can be manufactured.