| 摘要 |
The present invention relates to an air floating stage which is used to return a substrate by floating the substrate during a flat panel display (FPD) manufacturing process or the like. The air floating stage comprises: a plate (100) on which the substrate (10) is placed; multiple air supply lines (110) which are formed to vertically penetrate the top surface of the plate (100) and are arranged to be separated from each other in the horizontal direction of the plate (100); and multiple air exhaust lines (120) which are formed to vertically penetrate the top surface of the plate (100), are arranged to be separated from each other in the horizontal direction of the plate (100), and are arranged alternately with the air supply lines (110), respectively. Therefore, the air floating stage prevents both ends of the floating substrate from bending downward by increasing the amount of air supplied from the air supply lines. |
