发明名称 METAL MASK, METAL MASK PRODUCING METHOD, AND FILMING METHOD USING METAL MASK
摘要 PROBLEM TO BE SOLVED: To provide a metal mask capable of suppressing the deformation thereof effectively and mounting the metal mask easily, a production method of the metal mask, and a filming method using the metal mask.SOLUTION: A metal mask to be used when a substrate is filmed with a material, comprises: a metal mask body having a region where apertures are arranged in an array shape; and a reinforcing member arranged outside the region and extending from one end to the other end of the metal mask body. The reinforcing member is made of a metal having a lower thermal expansion coefficient than that of the metal mask body and a magnetism, and is fixed by the magnet which is arranged at a position opposing to the reinforcing member across the substrate.
申请公布号 JP2015229774(A) 申请公布日期 2015.12.21
申请号 JP20140114691 申请日期 2014.06.03
申请人 NLT TECHNOLOGIES LTD 发明人 MATSUEDA YOJIRO
分类号 C23C14/24;C23C14/04;H01L51/50;H05B33/10 主分类号 C23C14/24
代理机构 代理人
主权项
地址