LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a technique which is advantageous to reduction of power consumption of a motor for driving a table for holding a substrate.SOLUTION: A lithographic apparatus for forming a pattern on a substrate has a motor for driving a table for holding the substrate according to a driving profile, a setting unit for setting a normal mode or a power saving mode as an operation mode for the motor, and a controller for changing the driving profile so that the amount of heat of the motor caused by the driving of the table is smaller than that in the normal mode and the lithographic apparatus satisfies the number of substrates to be processed per unit time when the power saving mode is set.