METHOD FOR MANUFACTURING SOLID STATE IMAGE PICKUP DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a solid state image pickup device capable of reducing variations in height of an optical waveguide.SOLUTION: A method for manufacturing a solid state image pickup device includes the steps of: forming a first insulating film on a semiconductor substrate; flattening the first insulating film; forming a second insulating film after flattening the first insulating film; forming an opening in the first and second insulating films; and forming an embedding member in the opening and forming an optical waveguide. The method further includes a step of measuring the thickness of the first insulating film after the first insulating film forming step and before the second insulating film forming step. The second insulating film forming step forms the second insulating film on the basis of the thickness of the first insulating film.