CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam device highly efficiently detecting fluorescence generated by highly accelerated incident electrons while minimizing loss.SOLUTION: According to the present invention for accomplishing the above purpose, the charged particle beam device is provided which includes a detector for detecting charged particles obtained based on irradiation of a charged particle beam. The detector comprises a substrate (sapphire) and a luminous layer (GaInN quantum well layer) that is formed on the substrate and comprises a plurality of first layers containing GaInN and second layers containing GaN alternately laminated on top of each other. In the charged particle beam device, a substrate surface facing the luminous layer has a plurality of protrusions formed thereon.