DETECTION DEVICE, DETECTION METHOD, CLEANING DEVICE AND CLEANING METHOD

摘要

PROBLEM TO BE SOLVED: To solve the problem in which conventional arts cannot efficiently collect and detect an inspected substance.SOLUTION: A detection device comprises: an electrode unit; a cooling unit that cools the electrode unit; an inspected substance detection unit that detects an inspected substance; a counter electrode unit that is provided between the electrode unit and the inspected substance detection unit; and a gas sample introduction port that introduces a gas sample including the inspected substance. The electrode unit is cooled by the cooling unit, thereby dew condensation water is formed on a surface of the electrode unit. The gas sample introduced from the gas sample introduction port is blasted on the surface of the electrode unit to make the inspected substance collected by the dew condensation water, and potential between the counter electrode unit and the electrode unit is generated to thereby make the dew condensation water into an electrically charged particle, and the inspected substance is conveyed to the inspected substance detection unit, which detects the conveyed inspected substance. The electrode unit is located between the counter electrode unit and the gas sample introduction port.