LOGIC CELL, INTEGRATED CIRCUIT INCLUDING LOGIC CELL, AND METHODS OF MANUFACTURING THE SAME

摘要

A logic cell includes: conductive regions which are formed on the first level on a substrate; a first line layer which is extended in a first direction on a second level higher than the first level on the substrate, and is connected to a first conductive region selected among the conductive regions through a via contact; a second line layer which is extended in a second direction intersecting with the first direction on a third level higher than the second level on the substrate, and is connected to a second conductive region selected among the conductive regions; and a deep via contact which is extended from the second conductive region to the second line layer in a position separated from the first line layer.