| 摘要 |
PROBLEM TO BE SOLVED: To provide a separation apparatus stable in a suction state, following a shape of a stacked body, occurring no separation of suction, and causing no failures such as deflections and wrinkles.SOLUTION: A separation apparatus 1 is used for separating a thin-film flexible stacked body 3 from a component 16 where the flexible stacked body 3 including an element layer is formed over a rigid substrate 2 such as a glass substrate, a quartz substrate, a ceramic substrate, or a metal substrate. The separation apparatus 1 mainly includes: a fixing device 10 for fixing a rectangular substrate 2 of the component 16; a suction jig 11 for lifting the flexible stacked body 3 by suction to be separated; a circular suction pad 13 that is brought into direct contact with the flexible stacked body 3 and closely attached to the flexible stacked body 3 by suction; and a clamp jig 9 for holding an edge of the flexible stacked body 3. A position sensor such as a laser measuring instrument for measuring or monitoring a separation state of the flexible stacked body may be used together. |
