发明名称 LIQUID PHOTOSENSITIVE ADHESIVE
摘要 PROBLEM TO BE SOLVED: To provide: a method for manufacturing a semiconductor wafer with an adhesive layer, by which a semiconductor wafer with an adhesive layer sufficiently reduced in voids at a bump portion, and capable of sufficiently reducing warpage after grinding can be obtained; a method for manufacturing a semiconductor device using such a semiconductor wafer with an adhesive layer; and a method for manufacturing a semiconductor wafer with a semiconductor element.SOLUTION: A liquid photosensitive adhesive of the present invention is a liquid photosensitive adhesive for forming a photosensitive adhesive layer on a circuit surface of a semiconductor wafer that has the circuit surface on which a metal bump is formed, and includes (A) a radiation polymerizable compound, (B) a photoinitiator and (C) a thermosetting resin, the (A) component including imide group-containing (meth)acrylate with one carbon-carbon double bond in a molecule.
申请公布号 JP2015228524(A) 申请公布日期 2015.12.17
申请号 JP20150172985 申请日期 2015.09.02
申请人 HITACHI CHEMICAL CO LTD 发明人 MITSUKURA KAZUYUKI;OKUBO KEISUKE;ENOMOTO TETSUYA;MASUKO TAKASHI;NAGAI AKIRA
分类号 H01L21/60;C09J4/02;C09J11/06;C09J201/00 主分类号 H01L21/60
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