发明名称 |
CLAMP ARRANGEMENT FOR A SUBSTRATE CARRIER, AND METHOD FOR OPENING AND FASTENING A CLAMP ARRANGEMENT |
摘要 |
<p>A clamp device (100), a clamp tool (200), and a clamp arrangement (300) for clamping a substrate (480) to be processed in a substrate carrier (500) are described. The clamp device includes a first lever (110) and a second lever (120), wherein the first lever (110) is movably supported in a first joint (115), the second lever (120) is movably supported in a second joint (125), and wherein the first lever (110) and the second lever (120) are movably connected to each other by a first common joint (140). The second lever (120) includes a clamping portion (121) adapted for being pressed against the substrate (480; 510) to be processed. At least one of the first lever (110) and the second lever (120) comprises a contact portion (116; 126) for providing functional contact to a clamp tool (200; 610). The clamp tool is adapted for opening and fastening the clamp device.</p> |
申请公布号 |
WO2015188878(A1) |
申请公布日期 |
2015.12.17 |
申请号 |
WO2014EP62420 |
申请日期 |
2014.06.13 |
申请人 |
APPLIED MATERIALS, INC.;BRÜNING, ANDRE;HINTERSCHUSTER, REINER |
发明人 |
BRÜNING, ANDRE;HINTERSCHUSTER, REINER |
分类号 |
H01L21/67;H01L21/687 |
主分类号 |
H01L21/67 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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