发明名称 BICYCLOHEXANE DERIVATIVE COMPOUND AND PRODUCTION METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a new bicyclohexane derivative compound that is useful for a modifier for a photoresist resin or a dry etching durability improving agent in a field of photolithography, agricultural or pharmaceutical intermediates, various industrial products, and the like.SOLUTION: The bicyclohexane derivative compound is represented by the formula (VI). In the formula, Y each independently represents an alkyl group having 1 to 10 carbon atoms, halogen, acyloxy group, alkoxycarbonyl group, or hydroxyl group; m represents an integer of 0 to 11; m' represents an integer of 0 to 10; and Rto Reach independently represent H or an alkyl group having 1 to 3 carbon atoms.
申请公布号 JP2015227336(A) 申请公布日期 2015.12.17
申请号 JP20150115132 申请日期 2015.06.05
申请人 MITSUBISHI GAS CHEMICAL CO INC 发明人 ECHIGO MASATOSHI;OGURO MASARU
分类号 C07C69/54;C07C43/303;C07C69/675;C08F20/28;G03F7/004;G03F7/039;G03F7/20 主分类号 C07C69/54
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