MEMS Device With Optical Component

摘要

A micro electro mechanical system (MEMS) microphone includes a lid, at least one wall coupled to the lid, a substrate, and a MEMS die. The substrate is coupled to the at least one wall and a port extending through the substrate. The MEMS die is disposed on the substrate, and the MEMS die including a movable diaphragm and back plate. The optical sub-assembly is coupled to the lid, and the optical sub-assembly is configured and arranged to sense a position of the diaphragm.

主权项

1. A micro electro mechanical system (MEMS) microphone comprising:
a lid; at least one wall coupled to the lid; a substrate coupled to the at least one wall and a port extending through the substrate; a MEMS die disposed on the substrate, the MEMS die including a movable diaphragm and back plate; an optical sub-assembly coupled to the lid, the optical sub-assembly configured and arranged to sense a position of the diaphragm.