| 发明名称 |
MEMS DEVICE CALIBRATION |
| 摘要 |
One example discloses a MEMS device, including: a cavity having an internal environment; a seal isolating the internal environment from an external environment outside the MEMS device; wherein the seal is susceptible to damage in response to a calibration unsealing energy; wherein upon damage to the seal, a pathway forms which couples the internal environment to the external environment; and a calibration circuit capable of measuring the internal environment before and after damage to the seal. |
| 申请公布号 |
US2015362395(A1) |
申请公布日期 |
2015.12.17 |
| 申请号 |
US201414301618 |
申请日期 |
2014.06.11 |
| 申请人 |
ams International AG |
发明人 |
Goossens Martijn;Besling Willem Frederik Adrianus;Steeneken Peter Gerard;van der Avoort Casper;Pijnenburg Remco Henricus Wilhelmus |
| 分类号 |
G01L27/00 |
主分类号 |
G01L27/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A MEMS device, comprising:
a cavity having an internal environment; a seal isolating the internal environment from an external environment outside the MEMS device; wherein the seal is susceptible to damage in response to a calibration unsealing energy; wherein upon damage to the seal, a pathway forms which couples the internal environment to the external environment; and a calibration circuit capable of measuring the internal environment before and after damage to the seal. |
| 地址 |
Rapperswil-Jona CH |
