| 摘要 |
PROBLEM TO BE SOLVED: To provide an oxide sintered body and a production method of the oxide sintered body excellent in production stability, film formation stability, discharge stability and mechanical strength, and an oxide film having an intermediate refractive index obtained by using the oxide sintered body.SOLUTION: An oxide film having a refractive index of 1.70 or more and 1.90 or less is produced by using the following oxide sintered body. The oxide sintered body has a Si content of 0.65 or more and 1.75 or less in terms of a Si/In atomic ratio, contains a crystalline phase of indium silicate by 70 mass% or more and no metal Si phase, and has a relative density of 90% or more. |
