| 摘要 |
A position sensor for detecting a position of a measurement object, in particular of an optical element of a lithography apparatus is suggested, which includes a transmission coil, a reception coil, which is arranged in such a way that when a transmission signal (Vt, It) is applied to the transmission coil, a reception voltage (Vz, Vx) is generated at the reception coil, and an evaluation device, which links a transmission voltage signal generated in a manner dependent on the transmission signal with a reception voltage signal generated in a manner dependent on the reception voltage and generates a sensor output signal containing information about the relative position of the measurement object with respect to the coils of the position sensor. |
