发明名称 感放射線性組成物、遮光膜および固体撮像素子
摘要 To provide a radiation-sensitive composition which is capable of forming a film that has high adhesion to a substrate and long development latitude. A radiation-sensitive composition, which contains a compound represented by general formula (1), titanium black particles, a dispersant and an organic solvent, and wherein: a material to be dispersed including the titanium black particles has a BET specific surface area within the range of 20-120 m2/g; the material to be dispersed including the titanium black particles contains Si atoms; and the content ratio of the Si atoms to the Ti atoms in the material to be dispersed is within the range of 0.01-0.45. AA General formula (1)
申请公布号 JP5833969(B2) 申请公布日期 2015.12.16
申请号 JP20120104031 申请日期 2012.04.27
申请人 富士フイルム株式会社 发明人 村山 哲;室 祐継
分类号 G03F7/004;G02B5/20;G02B5/22;G03F7/027;G03F7/031;G03F7/033;H01L27/14 主分类号 G03F7/004
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