发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a semiconductor device which has both high adhesive strength and electrical reliability after bonding, even if a bump shape is small. <P>SOLUTION: A semiconductor substrate 1 which has a connection electrode 2 and is provided with a first metal film 4 and a second metal film 5, and an electrical connection projection 10 on the connection electrode 2 is provided with a metal protection layer 6 adjacently to an outer circumferential part of the electric connection projection 10. When a wiring board 20 is bonded to the electrical connection projection 10, a deformed electric connection projection 10a which is the electronic connection projection 10 deformed as a result of the bonding comes into contact with a surface of the metal protection layer 6 to improve the adhesive strength and electric reliability after the bonding. Curing processing is not necessary, as in the case where a resist is used for a protective layer, and patterning is facilitated. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2009004667(A) 申请公布日期 2009.01.08
申请号 JP20070165772 申请日期 2007.06.25
申请人 CANON INC 发明人 SUDO MASANORI
分类号 H01L21/60 主分类号 H01L21/60
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