| 摘要 |
A method for sterilization according to the present invention comprises: a first sterilization step of providing a sterilization subject in a sealed sterilization chamber and sterilizing the sterilization subject by providing ozone inside the sterilization chamber; a first decomposition step of decom posing the ozone inside the sterilization chamber; a first vacuumization ste p discharging the gas inside the sterilization chamber and reducing the pres sure inside the sterilization chamber; a second sterilization step of provid ing hydrogen peroxide into the vacuumized sterilization chamber to sterilize the sterilization subject; a third sterilization step of providing ozone in to the sterilization chamber; a second decomposition step of decomposing the hydrogen peroxide and ozone inside the sterilization chamber; and a second vacuumization step of discharging the gas inside the sterilization chamber a nd reducing the pressure inside the sterilization chamber.
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