摘要 |
PROBLEM TO BE SOLVED: To provide a compact surface-mounting type piezoelectric vibration device having more stable temperature characteristics and higher reliability. SOLUTION: The surface-mounting type piezoelectric vibration device housing a piezoelectric diaphragm 2 with an exciting electrode in a container of a rectangular shape in plane view, configured by covering a ceramic package 1 with a cover 5, comprises: a heater 3 for heating the piezoelectric diaphragm in the container; and a sensor 4 for detecting the temperature inside the container. Wherein, the heater is formed in the ceramic package and one or more heat conduction parts 12, 13 thermally connected with the heater for heating the piezoelectric diaphragm in the container are formed at each of side walls corresponding to sides of the container. COPYRIGHT: (C)2009,JPO&INPIT
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