摘要 |
PROBLEM TO BE SOLVED: To provide a front surface mirror having excellent adhesiveness between an Al film as a reflection film and a metal oxide film or a metal nitride oxide film functioning as an reflection enhanced film and protective film. SOLUTION: A front surface reflection mirror is provided which is the front surface mirror having a metal film and a metal oxide film, or a metal nitride film and a metal oxide film formed on a glass substrate, wherein an Al-AlO<SB>z</SB>gradient film, a SiN<SB>x</SB>O<SB>y</SB>film and a Nb<SB>2</SB>O<SB>5</SB>film are successively layered on the glass substrate. Alternatively, the front surface mirror is provided which has the SiN<SB>x</SB>O<SB>y</SB>film formed between the glass substrate and the Al-AlO<SB>z</SB>gradient film, wherein a ratio of (film thickness of the Al film)/(film thickness of the Al film + film thickness of the AlO<SB>z</SB>gradient film) is not more than 0.3. COPYRIGHT: (C)2009,JPO&INPIT
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